Computer Aided Automated Hybrid Substrate Probe Testing Development

摘要

The use of an electron beam for the contactless probing of hybrid substrates is discussed. The injection of an electrical charge using the electron beam results in a surface field which enhances the generation of secondary electrons which a second electron probe is directed at a substrate probe position. The discussion of the theoretical basis and experimental findings are correlated. The results of this study indicate that a new method of substrate probing exists. However, careful interpretation of the results must be performed. The applicability to multilayer thick film substrates suggest future adaptation as an in-line manufacturing or test technique. (Author)