SAW (Surface Acoustic Wave) Resonator and Reflective Array Devices.

摘要

This report documents the engineering effort applied during this Manufacturing Methods and Technology (MM/T) contract on two distinct SAW devices using grooved reflective arrays on two different piezoelectric substrate materials. One device is 60 MHz by 60 microsecond down chirp linearly-dispersive filter operating at 200 MHz using lithium niobate and the second device is a two-part, 100 KHz bandwidth resonator operating at 400 MHz using quartz. The reflective is formed by an ion beam etch process. The degree of time-linearity on the RAC filter was achieved by use of metallic phase correction patterns. With a common pattern, wth phase error was reduced to about 18 degrees (RMS); with a second correction pattern designed for each individual RAC, the phase error was further reduced to about 7 degrees (RMS). The corresponding sidelobe levels in the time-domain pulse compression loop using an ideal matched filter were 25 and 32 dB, respectively. (Author)