Electron Microscopy Observation of Electrotransport

摘要

An investigation of electromigration has resulted in the development of apparatus and test vehicles for use in conducting research in situ both in the scanning and transmission electron microscope (SEM and TEM) respectively. The unique design of test vehicles and modification of equipment allows for the experimental use of a prototype Joule-Thompson microminiature refrigerator. The refrigerator inside the SEM allows for the direct observation of electromigration experiments while controlling the temperature of the test vehicle. Research was performed in a temperature range lower than any previous effort (93K to 373K). Results agree with published literature. The patent-pending design and fabrication of the TEM specimen probe and its associated test vehicles provides the means for conducting in situ research into the crystalline structures and crystallographic changes associated with electromigration. The design provides the previously unattainable ability to monitor structure changes during the electromigration process in a non-contaminating environment which exists in the TEM. Results agree with published literature. (Thesis).