Plasma Properties of a Hydrocarbon Arcjet Used in the Plasma Deposition ofDiamond Thin Films

摘要

Plasma-deposited thin films of polycrystalline diamond were achieved with anarcjet plasma. The jet operated with hydrogen gas with small admixtures of CH4. The diamond films were highly nonuniform, probably due to the very high gradients of the chemical species and temperatures within the arcjet-substrate system. The arcjet apparatus, and optical emission spectra and Langmuir probe diagnostics of the plasma are described. Also presented are results for the surface chemical analysis of the diamond film using surface analysis by laser ionization.... Diamond thin films, Plasma diagnostics, Diagnostics, ArcjetPlasmas, Hydrocarbon plasmas, Optical emission spectroscopy.