Preparation of a Novel Gallium Arsenide Single-Source Precursor Having the Empirical Formula AsCl3Ga2.

摘要

GaCl3 and (Me3Si)3As react in a 2:1 mole ratio at room temperature to yield a moderately stable yellow substance having the empirical formula AsCl3Ga2. On heating, this new single-source precursor eliminates GaCl3 to give microcrystalline gallium arsenide, (GaAs).