1.06 Microns Laser-Induced Damage of Ti and Zr Thin-Film Optical Coatings

摘要

This article reports on 1.06 microns laser damage threshold values and damageappearance on TiO2 and ZrO2 as well as Ti3O5 single layer films and multilayer films. It studies the relationships between damage threshold values and film thickness, defects and protective coatings. jg.