Roughness in sputtered multilayers analyzed by transmission electron microscopy and X-ray diffuse scattering

摘要

Sputtered W/C multilayers with a period of 25 Angstrom have been studied both by cross-section TEM and by X-ray diffuse scattering using 10 keV synchrotron radiation. Fitting to the X-ray data is aided by the TEM images in modeling the roughness and roughness propagation within the Born approximation. We report on a study of the correctness of the often applied small roughness approximation, and we find that is not well justified in the present case. In order to probe short lateral length scales at q(y) = 0.1 Angstrom(-1), diffuse scattering data were obtained in an unconventional scattering geometry. (C) 2000 Published by Elsevier Science B.V. All rights reserved. [References: 15]