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首页> 外文期刊>Physica status solidi, B. Basic research >Micro reflectance difference techniques: Optical probes for surface exploration
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Micro reflectance difference techniques: Optical probes for surface exploration

机译:微反射率差技术:用于表面探测的光学探头

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摘要

Micro reflectance difference spectroscopy (μ-RDS) is a promising tool for the in-situ and ex-situ characterization of semiconductors surfaces and interfaces. We discuss and compare two different approaches used to measure μ-RD spectra. One is based on a charge-coupled device (CCD) camera, while the other uses a laser and a XY translation stage. To show the performance of these systems, we have measured surface optical anisotropies of GaSb(001) sample on which anisotropic strains have been generated by preferential mechanical polishing along [110] and directions. The spectrometers are complementary and the selection of one of them depends on the sample to be investigated and on experimental conditions.
机译:微反射率差光谱法(μ-RDS)是用于半导体表面和界面原位和异位表征的有前途的工具。我们讨论并比较了用于测量μ-RD光谱的两种不同方法。一种基于电荷耦合器件(CCD)相机,另一种基于激光和XY平移台。为了显示这些系统的性能,我们测量了GaSb(001)样品的表面光学各向异性,该样品上的各向异性应变是通过沿[110]和方向进行优先机械抛光而产生的。光谱仪是互补的,其中之一的选择取决于要研究的样品和实验条件。

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