We present a revised process flow for the integration of individual single-walled carbon nanotubes into microelectromechanical systems. The revision consists in a re-ordered process sequence which consider-ably increases the device yield. Thermal catalytic chemical vapor deposition of single-walled carbon nanotubes is performed conjunctly with annealing as the very last process step. Maskless catalyst deposition is demonstrated to produce individual single-walled carbon nanotubes with good location and orientation control by shaping the catalyst support. Straining experiments showed that the mechanical anchoring between the tube and the support can be sufficient.
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