Effect of filter coil current on properties of nc-TiC/a-C : H nanocomposite film prepared by dual plasma technique

摘要

Nanocomposite nc-TiC/a-C:H films, with an unusual combination of superhardness and high elastic recovery, are prepared by using dual plasma technique. The effect of the filter coil current on the compositional and structural properties of the nc-TiC/a-C:H films has been investigated. It is found that the deposition rate and the composition of nc-TiC/a-C:H films could be changed by varying the filter coil current. Fortunately, by selecting the proper value of the filter coil current, 2.5A, one can remarkably enhance the mechanical properties of the film, such as the superhardness (66.4 GPa), the high elastic modulus (510 GPa), and the high elastic recovery (83.3%).