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Hybrid photonics structures with grating and prism couplers based on ZnO waveguides

机译:基于ZnO波导的具有光栅和棱镜耦合器的混合光子结构

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This paper presents the results of investigations concerning input?output systems of an electromagnetic wave in the visible and near visible spectrum for their application in structures of integrated optics. The input?output structures used in described planar optical waveguides are in a form of prism and grating couplers. The first part of the paper contains numerical analysis of grating couplers aiming at an optimization of their geometrical parameters, strictly – the depth of the grooves in the grating coupler. The second part presents the practical realization, as well as experimental tests of the planar optical waveguide with the hybrid input?output system. As the input system of the electromagnetic wave, a prism coupler was used, and in the case of the output system – a photonic structure with grating coupler was applied. The investigated planar wave guides with the input?output structures were made of a wide energy band gap semiconductor – zinc oxide (ZnO).
机译:本文介绍了有关电磁波在可见光谱和近可见光谱中的输入输出系统的研究结果,以供其在集成光学系统中的应用。在所述平面光波导中使用的输入-输出结构是棱镜和光栅耦合器的形式。本文的第一部分包含了光栅耦合器的数值分析,旨在严格优化其几何参数-光栅耦合器中凹槽的深度。第二部分介绍了带有混合输入输出系统的平面光波导的实际实现以及实验测试。作为电磁波的输入系统,使用了棱镜耦合器;对于输出系统,则应用了具有光栅耦合器的光子结构。被研究的具有输入输出结构的平面波导是由宽能带隙半导体-氧化锌(ZnO)制成的。

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