High efficiency diffractive grating coupler based on transferred silicon nanomembrane overlay on photonic waveguide

摘要

We report here the design of a new type of high efficiency grating coupler, based on single crystalline Si nanomembrane overlay and stacking. Such high efficiency diffractive grating couplers are designed for the purpose of coupling light between single mode fibres and nanophotonic waveguides, and for the coupling between multiple photonic interconnect layers for compact three-dimensional vertical integration. Two-dimensional model simulation based on eigenmode expansion shows a diffractive power-up efficiency of 81% and a fibre coupling efficiency of 64%. With nanomembrane stacking, it is feasible to integrate the side-distributed Bragg reflector and bottom reflector, which can lead to the diffractive power-up efficiency and the fibre coupling efficiency of 97% and 73.5%, respectively. For a negatively detuned coupler, the bottom reflector is not needed, and the diffractive power-up efficiency can reach 98% over a large spectral range. The device is extremely tolerant to fabrication errors.