Total-reflection X-ray fluorescence imaging

摘要

A new experimental technique for surface imaging using total-reflection X-ray fluorescence (TXRF) is described. Although TXRF has so far been used to analyze the average chemical composition of rather large sample areas in the order of centimeters squared, a new opportunity to obtain spatial information has arisen through the combination of conventional TXRF and position-sensitive measurement using a collimator and a CCD camera. The most significant point here is that the extremely close detector sample geometry of TXRF measurement fits very well with the present imaging procedure. Scanning of the sample and / or incident beam is not necessary, and therefore the exposure time is reasonably short, typically 3-10 min. The number of pixels is approximately 1 million, and the spatial resolution obtained was several tens of microns in the present preliminary case. The selective-excitation capability of tunable monochromatic synchrotron radiation enhances the present imaging technique. Changing the energy of incident photons makes it possible to distinguish the elements, and one can obtain a surface image of the specific elements.