Carbon-metal (Ni or Ti) nanocomposite thin films for functional applications

摘要

A comparison between structure and mechanical properties of dc sputtered C-Ni and C-Ti nanocomposite thin films has been made in the growth temperature range of 25-800 deg C. C-Ni films undergo morphological and phase change at 400 deg C deposition temperature, while the C-Ti films possess the same phase state and morphological character in the whole range of deposition temperatures. Despite the structural differences the dependence of hardness (H) and elastic modulus (E) on the deposition temperature shows very similar behavior. The same character of the hardness and modulus curves is mostly influenced by the structure and the morphology of the carbon matrix. The difference in absolute value between the H and E curves of C-Ni and C-Ti could be related to the C-metal bonds, chemical stability and mechanical properties of the corresponding carbide phase.