Development of a multi-degree-of-freedom micropositioning, vibration isolation and vibration suppression system

摘要

This paper describes the design and performance testing of a micropositioning, vibration isolation and suppression system, which can be used to position a piece of equipment with sub-micrometre accuracy and stabilize it against various types of external disturbance. The presented demonstrator was designed as part of a novel extremely open pre-polarization magnetic resonance imaging (MRI) scanner. The active control system utilizes six piezoelectric actuators, wide-bandwidth optical fibre displacement sensors and a very fast digital field programmable gate array (FPGA) controller. A PID feedback control algorithm with emphasis on a very high level of integral gain is employed. Due to the high external forces expected, the whole structure is designed to be as stiff as possible, including a novel hard mount approach with parallel passive damping for the suspension of the payload. The performance of the system is studied theoretically and experimentally. The sensitive equipment can be positioned in six degrees of freedom with an accuracy of +/- 0.2 mu m. External disturbances acting on the support structure or the equipment itself are attenuated in three degrees of freedom by more than -20 dB within a bandwidth of 0-200 Hz. Excellent impulse rejection and input tracking are demonstrated as well.