A comprehensive inversion approach for feedforward compensation of piezoactuator system at high frequency

摘要

Motion control of the piezoactuator system over broadband frequencies is limited due to its inherent hysteresis and system dynamics. One of the suggested ways is to use feedforward controller to linearize the input-output relationship of the piezoactuator system. Although there have been many feedforward approaches, it is still a challenge to develop feedforward controller for the piezoactuator system at high frequency. Hence, this paper presents a comprehensive inversion approach in consideration of the coupling of hysteresis and dynamics. In this work, the influence of dynamics compensation on the input-output relationship of the piezoactuator system is investigated first. With system dynamics compensation, the input-output relationship of the piezoactuator system will be further represented as rate-dependent nonlinearity due to the inevitable dynamics compensation error, especially at high frequency. Base on this result, the feedforward controller composed by a cascade of linear dynamics inversion and rate-dependent nonlinearity inversion is developed. Then, the system identification of the comprehensive inversion approach is proposed. Finally, experimental results show that the proposed approach can improve the performance on tracking of both periodic and non-periodic trajectories at medium and high frequency compared with the conventional feedforward approaches.