Ultrasonic wave propagation of flexible piezoelectric polymer for tactile actuator: simulation and experiment

摘要

This study deals with ultrasonic wave propagation on a piezoelectric polymer substrate for tactile actuator. On the piezoelectric polymer substrate, a pair of interdigital transductor (IDT) electrodes is patterned by lift-off process and a resonator is made by exciting the IDTs. A standing wave is generated between the pair of IDT electrodes, of which the wavelength matches with the distance between two IDTs. The standing ultrasonic waves can give different textures to the users. The wave propagation in this periodic structure on the polymer substrate is studied by harmonic and transient analysis. Vertical displacement and induced voltage at the output IDT electrode are calculated and the ultrasonic wave generation is experimentally verified. The proposed concept of tactile actuator based on ultrasonic wave is explained.