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首页> 外文期刊>SIAM Journal on Applied Mathematics >PHASE-FIELD MODELING AND SIMULATION OF THE ZONE MELTING PURIFICATION PROCESS
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PHASE-FIELD MODELING AND SIMULATION OF THE ZONE MELTING PURIFICATION PROCESS

机译:区域熔融提纯过程的相场建模与仿真

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摘要

Zone melting is an efficient purification method that is widely used in the manufacture of semiconductors. Recently, it has been used in the purification of industrial phosphorus [Z. Zhang et al., Separation Purification Tech., 98 (2012), pp. 249–254]. It is a process consisting of both the melting-solidification process and the solute diffusion process. There is a great demand for a quantitative understanding of the underlying mechanism. In this paper, we start from a twocomponent, two-phase physical system and propose a variational phase-field model to model the zone melting process. The model consisting of the Allen–Cahn equation, the heat equation, and the solute diffusion equation is solved numerically. To overcome the stiffness caused by the nonlinear term in the Allen–Cahn equation, we propose a semi-implicit scheme based on a convex splitting of the free energy. By a proper splitting of the free energy functional, we show that our semi-implicit scheme is unconditionally energy stable. Numerical experiments are carried out to verify the convergence and stability of our numerical scheme. Furthermore, we present our numerical simulations for the zone melting process and numerically show the feasibility of our model by comparisons with experiments.
机译:区域熔化是一种有效的纯化方法,已广泛用于半导体制造中。最近,它已用于工业磷的提纯[Z. Zhang et al。,Separation Purification Tech。,98(2012),pp。249–254]。它是一个既包含熔化固化过程又包含溶质扩散过程的过程。迫切需要对潜在机制的定量理解。在本文中,我们从两组分,两相物理系统开始,并提出了变分相场模型来模拟区域熔化过程。该模型由Allen–Cahn方程,热方程和溶质扩散方程组成,并通过数值求解。为了克服由Allen-Cahn方程中的非线性项引起的刚度,我们提出了一种基于自由能的凸分裂的半隐式方案。通过自由能函数的适当划分,我们表明我们的半隐式方案是无条件的能量稳定。进行数值实验以验证我们数值方案的收敛性和稳定性。此外,我们提供了区域熔化过程的数值模拟,并通过与实验的比较数字地表明了我们模型的可行性。

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