Backplane Process Technology for AMOLEDs with Bottom-Gate TFTs and Laser Annealing

摘要

TFT backplane process for AM-OLED was developed by integrating a G8 compatible CW green laser annealing into conventional bottom-gate TFT process. Novel coating channel-etching-stopper (CES) and contact doping processes achieved the same high TFT performance as LTPS without critically increasing extra process steps.