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Low Pressure Hot Wall Deposition of Mono-crystalline Rubrene Thin Films for Organic Thin Film Transistors

机译:用于有机薄膜晶体管的单晶Rubrene薄膜的低压热壁沉积

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摘要

Mono-crystalline Rubrene (5,6,11,12-Tetraphenylnaphthacene) thin films with thickness between 1μm and 10 μm with grain sizes as large as 100 μm × 2 mm were successfully deposited on OTS(octadecyltrichlorosilane) coated TFT substrates by a low pressure and hot wall deposition method. Organic thin film transistors based on these high quality thin films have μ{sub}(average) of 1.77 cm{sup}2/V-s and μ{sub}(max) of 2.47 cm{sup}2/V-s, ON/OFF current ratios around 10{sup}6. The morphologies and crystallinities of rubrene thin films deposited under different conditions were studied with X-ray diffraction analysis. The average field effect mobility values of OTFTs based on these rubrene films were also compared to determine the optimal film deposition conditions.
机译:通过低压成功地在OTS(十八烷基三氯硅烷)涂层的TFT基板上成功沉积了厚度在1μm和10μm之间,粒径最大为100μm×2mm的单晶Rubrene(5,6,11,12-四苯基萘)薄膜。和热壁沉积法。基于这些高质量薄膜的有机薄膜晶体管的μ{sub}(平均值)为1.77 cm {sup} 2 / Vs,μ{sub}(max)为2.47 cm {sup} 2 / Vs,开/关电流比率约为10 {sup} 6。通过X射线衍射分析研究了在不同条件下沉积的红荧烯薄膜的形貌和结晶度。还比较了基于这些红荧烯薄膜的OTFT的平均场效应迁移率值,以确定最佳的薄膜沉积条件。

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