MASK FOR VAPOR DEPOSITION FOR MANUFACTURING ORGANIC THIN FILM TRANSISTOR, METHOD OF MANUFACTURING ORGANIC THIN FILM TRANSISTOR USING THE SAME, AND ORGANIC THIN FILM TRANSISTOR

摘要

PROBLEM TO BE SOLVED: To provide a mask for vapor deposition for manufacturing an organic TFT which makes it possible to form a high accurate patterning.;SOLUTION: The mask for the vapor deposition for manufacturing the organic TFT according to this invention is used in case of carrying out the vapor deposition of at least one patterning out of source and drain electrodes of the organic TFT, an organic semiconductor layer and a gate electrode. The mask for the vapor deposition is provided with a primary front surface suitable for a vapor-deposited substrate side and a secondary front surface suitable for a vapor deposition supply side. The primary front surface has a first opened window with at least one opening for forming the pattern and the secondary front surface has a second opened window with a substantially same shape as a shape consisting of the shortest outer line surrounding all openings of the first opened window. A distance D between the primary front surface and the secondary front surface and an opening width H in the channel length direction of the second opened window have the following relation: DH.;COPYRIGHT: (C)2008,JPO&INPIT