Pyroelectric sensor array for in-line monitoring of infrared laser

摘要

The fabrication and characterization of a freestanding pyroelectric sensor array based on zinc oxide for near-infrared imaging purposes are reported. The array consists of 4 x 4 pyroelectric sensing elements on a self-suspended silicon nitride/silicon oxide membrane. An access hole on the silicon substrate provides an access to incident laser for in-line and in situ beam profiling. The back-etch was done by standard KOH wet etch. The pyroelectric sensor material was zinc oxide thin-film deposited by magnetron sputtering. The pyroelectric thin-film exhibited (0 0 2) preferred orientation on gold bottom electrodes. The piezoelectric property of the oxide thin-film was also measured by laser interferometry. The current sensitivity, frequency dependence and detectivity of the freestanding array were measured with laser diodes. A brief discussion is dedicated to the microphony induced by piezoelectricity. (C) 2002 Published by Elsevier Science B.V. [References: 15]