An optical MEMS pressure sensor based on a phase demodulation method

摘要

A novel optical fiber pressure sensor based on a Fabry-Perot (FP) interferometer and phase demodulation method is described. MEMS techniques and common communication devices are used to fabricate the sensor. The principle of pressure measurement has been introduced; the relationship between silicon membrane size and sensor performance has been simulated. A phase demodulation method based on a Fourier transformation is explored, which can reduce errors resulting from intensity variations of a light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, and a wide pressure measurement range from 0 to 3 Mpa. (c) 2007 Elsevier B.V. All rights reserved.