The Temperature Distribution in a Film on a Substrate Heated by a Surface Spatially Periodic Source

摘要

The exact solution of the problem on transient heating of a film on a substrate by a surface periodic source is obtained. Steady-state values of the amplitude of the spatially periodic part of the temperature distribution and its setting time are found with the effect of the substrate taken into account. Conditions needed for the production of submicron periodic structures are determined.