Null test of aspheric surface based on digital phase-shift interferometer

摘要

In order to implement the null test of aspheric surfaces as simply as that of spherical ones in a commercial digital phase-shift interferometer, computer generated holograms (CGHs) that are composed of a main CGH, which produces the ideal aspheric wavefront, and an alignment CGH, which aids in calibration, were utilized. The principle of testing aspheric surface in an interferometer with CGHs is explained and critical aspects in designing, fabricating and calibrating CGHs are discussed in detail. Error analysis of the experimental results demonstrated that the uncertainty of the testing system is better than λ/10 (λ=0.6328 μm).