Film thickness measurement and defect inspection using optical coherence tomography

摘要

An optical sensing technology based on optical coherence tomography is presented for film thickness measurement and defect inspection. In order to improve the imaging quality, a simple interference spectrum processing procedure is proposed to eliminate the DC and the autocorrelation noise. With the proposed method, we obtain high quality one-dimensional depth and two-dimensional cross-sectional images of the films. Then, the thickness and the defect information of the film can be obtained from the acquired images. The experiment result demonstrates that this nondestructive imaging technique is applicable for measuring film thickness and inspecting defects.