An instrument for simultaneous visual and thermal testing of microelectronic devices

摘要

The problem of simultaneous visual and thermal testing of microobjects is considered. For this purpose, a mirror-lens optical system is proposed and constructed. The system has no movable elements and provides identical scales of images in spectral ranges of 0.4-0.8 and 8-14 mu m. The technique for calculating its dimensions and an experimental setup on the basis of this scheme are described. The results of its testing using an example of investigating microelectronic devices are presented.