Virtual Scanning Electron Microscope 5. Application in Nanotechnology and in Micro- and Nanoelectronics

摘要

The provided examples demonstrate the application of a simulator-based virtual scanning electron microscope (SEM) in certification of test object sizes on a low-voltage SEM and in calibration of a high-voltage SEM operating in the slow secondary electron detection mode. Using the virtual SEM, the problem of comparing different SEM calibration techniques is solved.