FIBERS FOR SENSING: Fiber-optic Fabry-Perot sensors take the strain under high temperature

摘要

Directly engraved on silicon or sapphire fibers using a 157 nm laser micromachining system, highly accurate micro fiber-optic Fabry-Perot interferometric (MFFPI) sensors are well suited to harsh environments. Using a custom-designed 157 nm excimer laser micromachining system, our group at the University of Electronic Science & Technology of China and WuXi ChengDian Optical Fiber Sensing Technology have created a series of novel micro fiber-optic Fabry-Perot interferometric (MFFPI) sensors. Because these micro fiber-optic sensors are directly engraved on silicon or sapphire fibers through formation of high-quality, in-line Fabry-Perot etalons, they have many outstanding advantages such as very small size, self-temperature compensation, high-temperature (>300 deg C) survivability, remote-measurement distance capability (>10 km), and are amenable to mass production. These sensors can easily measure strain, pressure, refractive index, temperature, and acceleration in harsh environments.