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Amorphous-silicon imagers enter medical mainstream

机译:非晶硅成像仪进入医学主流

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摘要

With clinical installations now more than five years old and the number of installations rapidly approaching 1000, amorphous-silicon x-ray imagers can finally claim to have entered the diagnostic imaging mainstream. However, the trip to the mainstream has not been easy and it is surely not yet complete. Amorphous silicon was proposed as a useful electronic material in the 1960s, originally as a basis for low-cost solar cells. Over the following 20 years, various researchers learned how to make photodiodes, photoconductors and, finally, thin-film transistors (TFTs) with performance sufficient to support commercial electronic applications. As the materials technology progressed, so did the fabrication capabilities, producing in the late 1970s several varieties of two-dimensional electronic arrays including the TFT array that underpins the active-matrix LCD now found in almost every laptop computer. Amorphous-silicon arrays became interesting as imagers because of their potentially low manufacturing cost, compatibility with deposition over large areas, and appropriate electronic performance. Imaging large areas with conventional crystalline silicon devices requires either bulky coupling optics or the very high cost of tiling numerous small imagers. Thus, applications requiring large imaging areas such as contact document scanning or x-ray imaging immediately emerged as potential markets for large amorphous-silicon sensor arrays.
机译:随着现在的临床装置已经使用了五年以上,并且装置数量迅速接近1000,非晶硅X射线成像仪最终可以声称已进入诊断成像主流。但是,进入主流并非易事,而且肯定还没有完成。非晶硅在1960年代被提出作为有用的电子材料,最初是作为低成本太阳能电池的基础。在接下来的20年中,各种研究人员学习了如何制造性能足以支持商业电子应用的光电二极管,光电导体以及最终的薄膜晶体管(TFT)。随着材料技术的进步,制造能力也随之提高,在1970年代末期生产了多种二维电子阵列,其中包括如今几乎在每台笔记本电脑中都采用的有源矩阵LCD支撑的TFT阵列。非晶硅阵列由于其潜在的低制造成本,与大面积沉积的相容性以及适当的电子性能而成为成像器,因此引起人们的兴趣。用常规的晶体硅器件对大面积成像需要大体积的耦合光学器件或拼接许多小型成像器的很高成本。因此,需要大面积成像的应用,例如接触文件扫描或X射线成像,立即成为大型非晶硅传感器阵列的潜在市场。

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