NONLINEAR FLEXURAL VIBRATION OF AFM MULTI-LAYERED PIEZOELECTRIC MICROCANTILEVER UNDER TIP-SAMPLE INTERACTION

摘要

In this paper, the vibration of an AFM microcantilever with one and two layers of piecewise piezoelectric is analyzed. With respect to discontinuities in the MC, due to the piezoelectric layer, the non-uniform beam model is used in the modeling of vibrating motion. The vibration analysis of MC is carried out near the sample surface in the non-contact mode. To solve the nonlinear differential equation of motion, both numerical solution and multiple time scales (MTS) method are used and the results are compared. Comparison of results, at the non-contact mode, shows good agreement between the two solving methods at normal equilibrium distances (d≥2nm). MC is modeled with one and two piezoelectric layers; the nonlinear behavior of each MC is studied by investigating the effect of geometrical dimensions of each layer on the nonlinearity of the system. It is then become clear that they can affect the nonlinearity of the system.