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Large-scale assembly of semiconductor nanowires into desired patterns for sensor applications

机译:将半导体纳米线大规模组装为传感器应用所需的图案

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摘要

The capability to rationally assemble semiconductor nanostructures into desired patterns is vital to their applications in functional devices. Here we report a facile method to assemble silicon nanowires (SiNWs) into large-area desired patterns by applying an external alternating electrical field between two photoresist-patterned indium tin oxide (ITO) electrodes. By manipulating the electrode geometries through photolithography, pattern shapes can be tuned, from parallel strips, concentric circles, grid-like structures to square windows. The patterns can be firmly preserved on the substrate after the removal of photoresist, and can be readily transferred onto a flexible and insulating substrate for further device applications. These NW patterns formed on the polydimethylsiloxane (PDMS) flexible substrate found excellent applications as both humidity and optical sensors with outstanding device stability and reproducibility. Moreover, it was found that the silver nanoparticle decorated-SINW (AgNPs@SiNW) patterns could serve as an excellent surface-enhanced Raman scattering (SERS) substrate for sensing Rhodamine 6G (R6G) molecules.
机译:合理地将半导体纳米结构组装成所需图案的能力对其在功能器件中的应用至关重要。在这里,我们报告了一种通过在两个光刻胶图案化的铟锡氧化物(ITO)电极之间施加外部交变电场,将硅纳米线(SiNWs)组装成大面积所需图案的简便方法。通过光刻技术控制电极的几何形状,可以从平行条,同心圆,网格状结构到方形窗口来调整图案形状。在去除光致抗蚀剂之后,图案可以牢固地保留在基板上,并且可以容易地转移到柔性且绝缘的基板上以用于进一步的器件应用。这些在聚二甲基硅氧烷(PDMS)柔性基板上形成的NW图案作为湿度传感器和光学传感器均具有出色的设备稳定性和可重复性,因此非常适用。此外,发现银纳米颗粒修饰的SINW(AgNPs @ SiNW)图案可以用作感测若丹明6G(R6G)分子的出色的表面增强拉曼散射(SERS)衬底。

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