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Microsphere-assisted fabrication of high aspect-ratio elastomeric micropillars and waveguides

机译:高纵横比的弹性微柱和波导的微球辅助制造

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High aspect-ratio micropillars are in strong demand for microtechnology, but their realization remains a difficult challenge, especially when attempted with soft materials. Here we present a direct drawing-based technique for fabricating micropillars with poly(dimethylsiloxane). Despite the material's extreme softness, our technique enables routine realization of micropillars exceeding 2,000 mm in height and 100 in aspect-ratio. It also supports in situ integration of microspheres at the tips of the micropillars. As a validation of the new structure's utility, we configure it into airflow sensors, in which the micropillars and microspheres function as flexible upright waveguides and self-aligned reflectors, respectively. High-level bending of the micropillar under an airflow and its optical read-out enables mms(-1) scale-sensing resolution. This new scheme, which uniquely integrates high aspect-ratio elastomeric micropillars and microspheres self-aligned to them, could widen the scope of soft material-based microdevice technology.
机译:高纵横比的微柱对微技术有强烈需求,但实现它们仍然是一个艰巨的挑战,尤其是在尝试使用软质材料时。在这里,我们介绍了一种基于拉伸的直接技术,该技术用于制造具有聚二甲基硅氧烷的微柱。尽管材料具有极高的柔软性,我们的技术仍可实现高度超过2,000 mm,纵横比超过100的微柱的常规实现。它还支持微柱顶端的微球原位整合。为了验证新结构的实用性,我们将其配置到气流传感器中,其中的微柱和微球分别用作柔性立式波导和自对准反射器。微柱在气流下的高水平弯曲及其光学读数可实现mms(-1)刻度感应分辨率。这种新方案独特地集成了高纵横比的弹性体微柱和与它们自对准的微球,可以扩大基于软材料的微器件技术的范围。

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