Atomic Force Microscopy Metrology of Catalytic Nanoparticles

摘要

In this study, the problem of obtaining reliable information on the size distribution of nanoparti cles on a rough surface or adhered nanoparticles by atomic force microscopy (AFM) is considered. A method to decrease the distorting effect of the above factors is proposed. The results of modeling demonstrate that the elaborated algorithm is functional. The results of processing the AFM images of Ni nanoparticles exhibiting catalytic activity during the electrooxidation of ethanol are presented. The effect of the convolution on the observable sizes and areas of nanopaticles is estimated.