首页> 外国专利> ATOMIC FORCE MICROSCOPY BASED ON NANOWIRE TIPS FOR HIGH ASPECT RATIO NANOSCALE METROLOGY/CONFOCAL MICROSCOPY

ATOMIC FORCE MICROSCOPY BASED ON NANOWIRE TIPS FOR HIGH ASPECT RATIO NANOSCALE METROLOGY/CONFOCAL MICROSCOPY

机译:基于NANOWIRE技巧的原子力显微镜用于高比例纳米尺度计量学/共聚焦显微镜

摘要

Nanowires that may be utilized in microscopy, for example atomic force microscopy (AFM), as part of an AFM probe, as well as for other uses, are disclosed. The nanowires may be formed from a Group III nitride such as an epitaxial layer that may be or include gallium nitride, indium nitride, aluminum nitride, and an alloy of these materials. During use of the AFM probe to measure a topography of a test sample surface, the nanowire can activated and caused to lase and emit a light, thereby illuminating the surface with the light. In an implementation, the light can be collected by the AFM probe itself, for example through an optical fiber to which the nanowire is attached.
机译:公开了可用于显微术例如原子力显微术(AFM)的纳米线,作为AFM探针的一部分,以及用于其他用途。纳米线可以由诸如外延层的III族氮化物形成,该III族氮化物可以是或包括氮化镓,氮化铟,氮化铝以及这些材料的合金。在使用AFM探针测量测试样品表面的形貌时,纳米线可以被激活并发射激光并发射光,从而用光照射表面。在一个实施方式中,光可以由AFM探针本身收集,例如通过附着有纳米线的光纤收集。

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