Self-assembled organic monolayer nanopore crossbar junctions were fabricated as a test structure for molecular electronics. The device yield, which is typically very low due to electrical shorting on top electrode deposition, is studied for different deposition parameters, and a clear improvement (up to 45 percent yield) is obtained by indirect deposition of silver electrodes on cooled substrates. Nevertheless, the yield fluctuates strongly from run to run (approx 8 percent to approx 45 percent), implying that reliable device fabrication remains challenging. We find a small number of devices (<1 percent) show switching behaviour in conductivity, presumably due to metal filaments.
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