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Electrochemically replicated smooth aluminum foils for anodic alumina nanochannel arrays

机译:电化学复制的光滑铝箔,用于阳极氧化铝纳米通道阵列

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摘要

A fast electrochemical replication technique has been developed to fabricate large-scale ultra-smooth aluminum foils by exploiting readily available large-scale smooth silicon wafers as the masters. Since the adhesion of aluminum on silicon depends on the time of surface pretreatment in water, it is possible to either detach the replicated aluminum from the silicon master without damaging the replicated aluminum and master or integrate the aluminum film to the silicon substrate. Replicated ultra-smooth aluminum foils are used for the growth of both self-organized and lithographically guided long-range ordered arrays of anodic alumina nanochannels without any polishing pretreatment.
机译:通过利用容易获得的大规模光滑硅晶片作为母版,已经开发了一种快速的电化学复制技术来制造大规模的超光滑铝箔。由于铝在硅上的附着力取决于在水中进行表面预处理的时间,因此可以在不损坏复制的铝的情况下将复制的铝与硅母板分离,并将母板或铝膜集成到硅基板上。复制的超光滑铝箔可用于自组织和光刻引导的阳极氧化铝纳米通道的远距离有序阵列的生长,无需任何抛光预处理。

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