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Titanium-nitride coated anodized aluminum and oxide coated aluminum foil radio frequency windows and secondary electron emission.

机译:氮化钛涂层阳极氧化铝和氧化物涂层铝箔射频窗口和二次电子发射。

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Radio frequency windows are used in various applications such as particle accelerators, vacuum systems, couplers, and communication electronics. Aluminum radio frequency windows are widely preferred because of their useful qualities such as their thermal stability, low out-gassing rate, mechanical strength, and dielectric properties. The problem with aluminum is its high multipactor susceptibility when high electric fields are applied in radio frequency applications. The application of thin film coatings of titanium nitride by varied means, have shown a reduction of multipactor. Coatings of oxygen on annealed aluminum foil radio frequency windows of less than nominal purity have yielded useful results as well. Although there are various other methods of reducing multipactor, thin film coatings are the most efficient and cost effective to implement. Analysis of titanium nitride pulsed laser deposited aluminum windows anodized for different times and annealed oxide adsorped thin films on an aluminum foil window for different times was done to examine their multipactor susceptibility and relative composition. The titanium nitride coated aluminum windows were shown to suppress multipactor quite well even after sputtering through layers of thin film. After successive sputtering and substantial digging, the thin film titanium nitride anodized aluminum windows revealed good structure, even distribution of material, and no penetration to the Al2O3 layer. The oxide thin film layers on the aluminum foil showed promise after a substantial layer depth was reached. The study has demonstrated that the Duarte (CIMAV) process is sound when multipactor is concerned and Al 2O3 coatings on less than pure aluminum foil is as well quite effective at suppressing multipactor at room temperatures.
机译:射频窗口用于各种应用中,例如粒子加速器,真空系统,耦合器和通信电子设备。铝射频窗因其有用的质量(如热稳定性,低除气率,机械强度和介电性能)而广受青睐。铝的问题在于,当在射频应用中施加高电场时,铝具有很高的多导磁化率。通过各种方式施加氮化钛薄膜涂层已显示出减少了多脚架。低于标称纯度的退火铝箔射频窗口上的氧气涂层也产生了有用的结果。尽管还有其他多种减少多乳化的方法,但薄膜涂层是最有效和最具成本效益的实施方法。对氮化钛脉冲激光沉积的铝窗进行了不同时间的分析,并分析了铝箔窗上经过退火处理的氧化吸附的薄膜的不同时间,以检查它们的多导磁化率和相对组成。氮化钛涂层的铝窗显示出即使在穿过薄膜层溅射后也能很好地抑制多极管。经过连续的溅射和充分的挖掘之后,薄膜氮化钛阳极氧化的铝窗显示出良好的结构,均匀的材料分布并且没有渗透到Al2O3层。在达到足够的层深度之后,铝箔上的氧化物薄膜层显示出希望。研究表明,当考虑使用多脚架时,Duarte(CIMAV)工艺是合理的,并且在比纯铝箔薄的铝箔上的Al 2O3涂层在室温下也很有效地抑制了多脚架。

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