Structural and optical characterization of the formation of beta-FeSi_2 nanocrystallites in an n-type (100) Si matrix

摘要

Ion-beam synthesized (IBS) samples, prepared with a low dose of iron ions and subjected to rapid thermal annealing (RTA) were studied. The samples were characterized with cross-sectional transmission electron microscopy (XTEM), including high-resolution electron microscopy (HREM) and far infrared transmittance (FIRT) spectroscopy. The formation of beta-FeSi_2 nanocrystallites, with various shapes and sizes, in the Si matrix was revealed. The optical constants dispersions of the samples were obtained from the reflectance (R) and transmittance (T) spectra, taken between 0.38 and 1.2 eV. From these dispersions, the energy band diagram of the interface beta -FeSi_(1.2)ev/Si was determined, and compared to those reported by other authors.