A flexure-based electromagnetic linear actuator

摘要

This paper introduces a novel nano-positioning actuator with large displacement and driving force, termed a flexure-based electromagnetic linear actuator (FELA). It mainly comprises an electromagnetic driving scheme and flexure-supporting bearings that provide infinite positioning resolution and highly repeatable motion. In this work, analytical modeling of the proposed electromagnetic scheme and flexure mechanism is presented. Solutions obtained from each model are evaluated by the experimental studies conducted on a FELA prototype. This prototype achieves a stroke of 4 mm with a positioning accuracy of +/- 10 nm. With direct force control, it generates various force profiles with a force -current ratio of 60 N A(-1) and an accuracy of +/- 0.3 N. Such capabilities make FELA a promising solution for realizing ultra-high precision layer-over-layer fabrication in the nano-imprinting process.