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InSb heterostructure nanowires: MOVPE growth under extreme lattice mismatch

机译:InSb异质结构纳米线:极端晶格失配下的MOVPE生长

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We demonstrate the growth of InSb-based nanowire heterostructures by metalorganic vapour phase epitaxy and use it to integrate InSb on extremely lattice-mismatched III-V nanowire templates made of InAs, InP, and GaAs. Influence of temperature, V/III ratio, and diameter are investigated in order to investigate the growth rate and morphology. The range of growth temperatures used for InSb nanowire growth is very similar to that used for planar growth due to the nature of the precursor decomposition. This makes optimization of growth parameters very important, and more difficult than for most other nanowire III-V materials. Analysis of the InSb nanowire epitaxial quality when grown on InAs, InP, and GaAs, along with InSb segment and particle compositions are reported. This successful direct integration of InSb nanowires, on nanowire templates with unprecedented strain levels show great promise for fabrication of vertical InSb devices.
机译:我们通过金属有机气相外延论证了基于InSb的纳米线异质结构的生长,并将其用于将InSb集成在由InAs,InP和GaAs制成的晶格不匹配的III-V纳米线模板上。为了研究生长速率和形态,研究了温度,V / III比和直径的影响。由于前驱物分解的性质,用于InSb纳米线生长的生长温度范围与用于平面生长的温度范围非常相似。这使得生长参数的优化非常重要,并且比大多数其他纳米线III-V材料更困难。报告了在InAs,InP和GaAs上生长时对InSb纳米线外延质量的分析,以及InSb片段和颗粒组成。 InSb纳米线在具有前所未有的应变水平的纳米线模板上的成功成功集成,显示了制造垂直InSb器件的巨大希望。

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