Very Large Scale Integration of Nanopatterned YBa2Cu3O7-delta Josephson Junctions in a Two-Dimensional Array

摘要

Very large scale integration of Josephson functions in a two-dimensional series-parallel array has been achieved by Ion irradiating a YBa(2)cu(3)O(7-delta) film through slits in a nanofabricated mask created with electron beam lithography and reactive ion etching. The mask consisted of 15820 high aspect ratio (20:1), 36 nm wide slits that restricted the irradiation in the film below to form Josephson Junctions. Characterizing each parallel segment k, containing 28 junctions, with a single critical current I-ck we found a standard deviation in I-ck Of about 16%.