Plasmonic Color Filters for CMOS Image Sensor Applications

摘要

We report on the optical properties of plasmonic hole arrays as they apply to requirements for plasmonic color filters designed for state-of-the-art Si CMOS image sensors. The hole arrays are composed of hexagonally packed subwavelength sized holes on a 150 nm Al film designed to operate at the primary colors of red, green, and blue. Hole array plasmonic filters show peak transmission in the 40?50% range for large (>5 × 5μm~2) size filters and maintain their filtering function for pixel sizes as small as ～1 × 1 μm~2, albeit at a cost in transmission efficiency. Hole array filters are found to robust with respect to spatial crosstalk between pixel within our detection limit and preserve their filtering function in arrays containing random defects. Analysis of hole array filter transmittance and crosstalk suggests that nearest neighbor hole?hole interactions rather than long-range interactions play the dominant role in the transmission properties of plasmonic hole array filters. We verify this via a simple nearest neighbor model that correctly predicts the hole array transmission efficiency as a function of the number of holes.