Preparation and Characterization of Organic-Inorganic Hybrid Materials Via Sol-Gel Reaction for Interlayer Dielectrics

摘要

Polyimides containing hydroxyl group, so-called poly(hydroxy-imide)s, were prepared by the thermal imidization in the presence of m-cresol. The poly(hydroxy-imide)s exhibited high resistance to thermal degradation. with 10percent weight loss temperature starting at near 527 deg C in am The organic/inorganic hybrid materials were prepared with TFOS by acid-catalyzed sol-gel reaction of sol-gel polyimide precursors obtained from the coupling reaction of the poly(hydroxy-imide) with 3-(triethoxysilyl)propyl isocyanate. All of the cured hybrid films spin-coated on ITO glass are transparent. The initial decomposition temperature was recorded at 356 deg C. The dielectric constant of a hybrid material film was 3.24 at the frequency of 10kHz. The hybrid materials retained the coefficient of thermal expansion up to 3 ppm/deg C below Tg and 30 ppm/deg C above Tg.