Profile measurement of a bent neutron mirror using an ultrahigh precision non-contact measurement system with an auto focus laser probe

摘要

A bent neutron mirror has been considered as one of the best solutions for focusing neutron beams from the viewpoint of cost-benefit performance. Although the form deviation of the bent profile is expected because of the large spot size, it is difficult to measure due to its geometric limitation. Here, we propose a non-contact measurement system using an auto focus (AF) laser probe on an ultrahigh precision machine tool to precisely evaluate the form deviation of the bent mirror. The AF laser probe is composed of a diode laser, a position sensitive sensor, a charge-coupled device (CCD) camera and a microscope objective lens which is actuated by an electromagnetic motor with 1 nm resolution for position sensing and control. The sensor enables a non-contact profile measurement of a high precision surface without any surface damage in contrast with contact-type ultrahigh precision coordinate measurement machines with ruby styli. In the on-machine measurement system, a personal computer simultaneously acquires a displacement signal from the AF laser probe and 3-axis positional coordinates of the ultrahigh machine tool branched between the linear laser scales and the numerical controller. The acquisition rate of the 4-axis positional data in 1 nm resolution is more than 10 Hz and the simultaneity between the axes is negligible. The profile of a neutron bent mirror was measured from a transparent side using the developed system, and the result proves that the form deviation of the mirror enlarged the the spot size of focused neuron beam.