Modeling and prototyping of a fiber Bragg grating-based dynamic micro-coordinate measuring machine probe

摘要

Higher-accuracy measurements of the 3D metrology of nano-and micro-structures are increasingly demanded. This paper details the prototyping of a novel 3D micro-scale coordinate measuring machine probe based on fiber Bragg grating sensors for true 3D measurements at micro-and nanometer scales. A new manufacturing technique for the high-precision cantilever used in the probe is also reported. Simulations are performed during the design and testing to help to test important aspects of the probe and to gain understanding about the influence of the probe geometrical parameters on the sensor sensitivity. The initial performance of the probe has been tested in both the vertical and horizontal directions, and the characterization results are promising. Further experimental results demonstrate that the probe is not affected by surface interaction forces.