An interferometric calibration system for various linear artefacts using active compensation of angular motion errors

摘要

A calibration system for linear-dimension artefacts was developed, which employed a multi-axis laser interferometer for direct metrological traceability and active compensation of angular motion errors. It can calibrate various end and line standards by changing probes (contact and optical probe). We designed the system as a moving probe type with a cantilever structure to reduce overall size and increase efficiency in calibration. A stage part including a two-axis tilt stage provides precise linear motion of a probing part over the range of 2000 mm with nanometric resolution. The three-axis interferometer measuring linear and rotational motions of the stage enables us to obtain probing position and compensate angular motion errors precisely. It was also arranged to minimize the Abbe offset, and so the Abbe error can be reduced remarkably combining the active compensation of angular motion errors. The overall system was installed in a temperature-controlled chamber to decrease thermal variation during measurements. The measurement uncertainty of the calibration system was analysed by considering the performance of the main components. We measured several long gauge blocks and a precision line scale, and compared the measured values with the reference ones and also checked their stabilities. Their deviations were less than 100 nm and existed within the expanded measurement uncertainty (k velence 2).