ERROR COMPENSATION UNIT FOR LINEAR MOTION SYSTEM

摘要

An error compensation apparatus for a linear transfer system is provided to simplify a construction and control of a stage system by additionally installing a piezoelectric actuator in the linear transfer system. A linear transfer system includes a ball screw(121) and a slider(122) engaged to the ball screw. A piezoelectric actuator is formed in a ring structure to enclose an outer periphery of the slider, and includes an opening having a width larger a diameter of the ball screw and smaller than a width of the slider. A flange(122-1) of the slider is fixed to the opening of the actuator by plural bolts, and is connected to a bracket(131) of the stage moved by the linear transfer system.