Probing-error compensation using 5 degree of freedom force/moment sensor for coordinate measuring machine

摘要

A new probing and compensation method is proposed to improve the three-dimensional (3D) measuring accuracy of 3D shapes, including irregular surfaces. A new tactile coordinate measuring machine (CMM) probe with a five-degree of freedom (5-DOF) force/moment sensor using carbon fiber plates was developed. The proposed method efficiently removes the anisotropic sensitivity error and decreases the stylus deformation and the actual contact point estimation errors that are major error components of shape measurement using touch probes. The relationship between the measuring force and estimation accuracy of the actual contact point error and stylus deformation error are examined for practical use of the proposed method. The appropriate measuring force condition is presented for the precision measurement.