FABRICATION AND SENSING CHARACTERISTICS OF THE CHEMICAL COMPOSITION GRATING SENSOR AT HIGH TEMPERATURES

摘要

The fabrication of the chemical composition gratings at high temperatures has been described. In the process of chemical composition, gratings formation, annealing, and development are necessary steps. Furthermore, the sensing characteristics of chemical composition grating sensor have been studied. Experimental results show that the temperature response is nonlinear over a temperature range from room temperature to 900℃, strain response of chemical composition grating sensor is linear at each temperature, and the strain sensitivity of the chemical composition grating sensor is about 1.10 pm με~(-1) over a temperature range from room temperature to 900℃. So, the chemical composition grating sensors will be an attractive solution for sensing application at high-temperature environments.